Patent holdings for IPC class H01J 27/02

Total number of patents in this class: 493

10-year publication summary

49
36
40
31
24
21
33
20
32
4
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Varian Semiconductor Equipment Associates, Inc.
1282
58
Applied Materials, Inc.
16587
45
Axcelis Technologies, Inc.
429
21
ALIS Corporation
36
17
Global Plasma Solutions, Inc.
68
13
FEI Company
851
11
Sharp Corporation
10015
10
Canon Anelva Corporation
676
10
Schlumberger Technology Corporation
9690
8
Tae Technologies, Inc.
220
7
Nissin ION Equipment Co., Ltd.
78
6
Tel Manufacturing and Engineering of America, Inc.
150
6
Agilent Technologies, Inc.
2744
5
Thermo Fisher Scientific (Bremen) GmbH
496
5
Accion Systems, Inc.
18
5
PerkinElmer U.S. LLC
312
5
Tsinghua University
5426
4
Carl Zeiss Microscopy, LLC
30
4
HIL Applied Medical, Ltd.
15
4
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
4
Other owners 245